Automatic Conveying Development Device ACT-300A2S

It is a compact automatic transport-type developing device.

The automatic conveyance development device "ACT-300A2S" is a machine that performs spray development while rotating substrates up to 6 inches in size. It is equipped with two systems for developing solution, one system for rinsing, and an air knife, allowing recipe settings to be operated via a touch panel, enabling automatic development processing of up to 25 pieces. *There is also a sheet-type model available without automatic processing. 【Main Specifications】 ○ Processing Capacity: Capable of continuous processing of up to 25 round substrates of 6 inches ○ Process: Developing solution: 2 systems, Rinsing: 1 system, Air knife: 1 system ○ Chemicals Used: Alkaline developing solution, deionized cleaning water For more details, please contact us or download the catalog.

basic information

Processing capacity: Maximum 6-inch round substrates, 25 pieces (dedicated cassette storage type) Process: Developer solution, 2 systems (nozzle interchangeable) Rinse, 1 system, air knife, 1 system Chemicals used: Alkaline developer solution, deionized cleaning water Transport robot: Manufactured by Tatsumo, substrate positioning accuracy achieved through centering stage Recipe: 10 steps x 50 patterns can be registered Processing time setting: In units of 0.1 seconds Substrate rotation speed: Controlled by AC servo motor, 0 to 3000 rpm, accuracy within ±2 rpm Device size: W1120 x D920 x H1950 mm or less, under 500 kg Control system: 8-inch touch panel operation Suction table: White Teflon, vacuum hole suction type Canister: 18L capacity, placed separately from the main unit, residual liquid amount detected by load cell Developer solution control temperature: 20 to 30°C ±3°C Utilities: Three-phase 200V/30A, leakage breaker, 1 system Built-in vacuum pump Air: 0.5 MPa Nitrogen: 0.3 MPa Exhaust: Exhaust port φ75 mm, 2 systems (electrical exhaust, cup exhaust) Developer solution waste: Collected in a poly tank or connected to factory waste disposal