Organic device deposition apparatus, vacuum ellipsometer deposition apparatus.
It is possible to measure optical properties in real time during vacuum deposition!
We design, manufacture, and sell the "Organic Device Deposition System with Vacuum Ellipsometer," which combines a vacuum deposition device and a high-speed spectroscopic ellipsometer. 【Features】 - Real-time measurement of optical properties during vacuum deposition - Deposition chamber dimensions: 280mm (width) x 290mm (depth) x 410mm (height) - Ellipsometer mounting flange: angle selectable (100 degrees / 120 degrees / 140 degrees) - Aluminum door: viewing window (effective visible diameter: Φ96mm) - Three ports for external feedthrough (NW40) - One port for vacuum exhaust (NW40) - Maximum substrate size: Φ110mm - Substrate heating or cooling mechanism - Evaporation source: 2 sources (simultaneous dual source) - Quartz film thickness monitor with substrate shutter - High vacuum pump: turbo pump
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