Real-time measurement of optical properties: 'Vacuum Ellipsometer Deposition System'
A deposition device for ellipsometry that can measure optical properties in real time during vacuum deposition.
Our company designs, manufactures, and sells a "vacuum ellipsometer deposition system" that can measure the optical properties of thin films in real-time during deposition. 【Deposition System Main Specifications】 ○ Main Body and Chamber → Deposition chamber dimensions: 280mm (width) × 290mm (depth) × 410mm (height) → Ellipsometer mounting flange: angle selectable 100°/120°/140° → Aluminum door: viewing window (effective visible diameter: φ96mm) → Three ports for external feedthrough (NW40) → One port for vacuum exhaust (NW40) ○ Substrate Holder Structure → Maximum substrate size: φ110mm → Substrate heating or cooling structure
basic information
For more details, please contact us or download the catalog.
Price range
Delivery Time
Applications/Examples of results
【Purpose】 ○ For in-situ ellipsometry deposition equipment ● For more details, please contact us.
