Small deposition machine "E-70 Series" for the purpose of organic device research.
Capable of multi-chamber configuration! A small deposition machine designed for organic device research.
The "E-70 Series" is a compact deposition machine designed for organic device research. It can be connected to other series machines, allowing for multi-chamber configurations. In the future, it will also be possible to connect to a glove box. 【Features】 ■ Designed for organic device research ■ Compact model ■ Can be connected to deposition devices from other series ■ Future capability for glove box connection *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
basic information
【Configuration (E-70Basic)】 ■Substrate size: 70x70 max ■Pump: Turbo P ■Evaporation sources: 8 sources max ■Simultaneous deposition: 3 sources max 【Configuration】 ■Main unit (E-70Basic) ■Turbo exhaust ■8 types of evaporation sources (simultaneous 2 sources) ■2 types of thickness measurement sensors ■1 type of thickness measurement device ■Valve operation switch *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
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For more details, please refer to the catalog. Feel free to contact us as well.
