Inline Dissolved Ozone Meter - Microcontroller Type
Inline Dissolved Ozone Meter, Microcontroller Type
This is an ultraviolet absorbance photometry instrument that monitors the dissolved ozone concentration in ozone-added pure water used in semiconductor processes and other applications in-line. It accommodates various site environments with pipe diameters ranging from Φ6×4 to 1 inch (please contact us for details due to fittings). The concentration range is from 0 to 10 ppm to 0 to 240 ppm. With a built-in microcontroller, it can stably measure the operation of low-pressure mercury lamps, which have individual variations. Even older equipment can continue to be used by undergoing an overhaul.
basic information
This is an instrument that monitors the dissolved ozone concentration in ozone-added pure water used in semiconductor processes, using an inline ultraviolet absorbance photometry method. - Pipe diameter: Φ6×4 to 1 inch *Please contact us for details as it depends on the fitting manufacturer. - Concentration range: 0 to 10 ppm to 0 to 240 ppm
Price information
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Delivery Time
Model number/Brand name
OZL-UI Series
Applications/Examples of results
Mainly semiconductor factories
