Inspection device "Pattern Inspection Device"
For distinguishing between good and defective products. Easy operation, automatic correction, and up to 10 specifications can be set.
The inspection device "Pattern Inspection Device" registers a normal surface as a master and detects foreign substances, scratches, dirt, and pattern defects by comparing the registered image during inspection. It also displays the position of the alignment pattern and performs dimensional inspections. The area and size (maximum diameter) of the detected patterns and foreign substances are measured, and the inspection result data is compared with measurement conditions to determine good or defective products. The inspection result data is filed and stored. For more details, please download the catalog.
basic information
**Features** - Compares inspection result data with measurement conditions to distinguish between good and defective products. - Inspection result data can be filed. - Enables inspection while moving across the entire surface by linking with a prober (or XY stage), not just on a single screen. - Automatically corrects positional deviations in images during inspection, allowing for inspection even if the master image and inspection image are slightly misaligned. - Allows setting different foreign matter judgment criteria by area on the screen using the specification setting function (up to 10 specifications). For more details, please contact us or download the catalog.
Price information
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Delivery Time
Applications/Examples of results
For more details, please refer to the catalog or contact us.
