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AR film defect inspection device 'EX2001S'

Equipped with horizontal FFU! High-speed clean inspection possible! Compact design AR film defect inspection device.

At Arrows Engineering, we handle the AR film defect inspection equipment manufactured by IT Tech. The 'EX2001S' is a defect inspection machine for anti-reflective films on glass substrates. It performs high-speed scan inspections of the surfaces and backs of transparent substrates using an inverted microscope and line camera to detect defects. 【Features and Functions】 - The maximum substrate size is 400mm, with auto-focus inspection for transparent substrates. - Detected defects include white foreign matter (gaps) and black foreign matter on the AR film substrate. - Minimum detection resolution is 2.8μm (1.4μm). - Review inspections can be remotely controlled (camera/lighting/objective magnification/stage and focus). *For more details, please refer to the PDF document or feel free to contact us.

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basic information

【Performance】 ■Normal Mode: 5x, resolution 2.8μm, inspection area/width 3mm×80mm/sec+α ■High-Speed Mode: 10x, resolution 1.4μm, inspection area/width 1.5mm×40mm/sec+α ■Other features include marking function *For more details, please refer to the PDF document or feel free to contact us.

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Applications/Examples of results

【Application】 ■Anti-reflective film for glass substrates *For more details, please refer to the PDF document or feel free to contact us.

AR film defect inspection device 'EX2001S'

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