Automatic infrared microscope
Visible AF focus on the wafer surface! Image measurement of pattern dimensions with an infrared microscope.
At Arrows Engineering, we handle the "Automatic Infrared Microscope" manufactured by IT Tech. This product performs image measurements of the pattern dimensions inside silicon using an infrared microscope, focusing visibly with AF on the surface of 8” bonded wafers. It is equipped with 2 cassettes, an edge grip chuck, and an edge aligner. 【Features】 ■ Target wafer: 8” ■ 2 cassettes ■ Positioning accuracy: ±1μm ■ Axis offset measurement: ±0.5μm ■ Line width measurement: 0.2μm *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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【Purpose】 ■ Image measurement of pattern dimensions *For more details, please refer to the PDF document or feel free to contact us.
