Mass Flow Controller "Aera FC-R7800 Series"
Flow stabilizes in less than 1 second after setting input! High precision and high reliability metal seal model!
The "Aera FC-R7800 Series" is a system that not only performs high-precision flow control but also features excellent airtightness due to its metal seals. It is suitable for major gas control applications. Thanks to advancements in technology, such as the incorporation of highly sensitive and fast-response small sensors, it demonstrates excellent controllability. 【Features】 ■ Corrosion-resistant design ■ Metal seal adoption ■ VCR and Swagelok compatible connections ■ Full-scale flow range from 10 sccm to 200 slm ■ Normally closed or normally open solenoid control valves *For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Specifications (Partial)】 ■ Full scale range: 10 sccm to 5 slm ■ Response time: Less than 1 second (0 to 100% ±2% Typical) SEMI E17-91 ■ Accuracy: Within ±1% of full scale ■ Linearity: Within ±0.5% of full scale ■ Repeatability: Within ±0.2% of full scale *For more details, please refer to the PDF document or feel free to contact us.
Price information
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Delivery Time
Model number/Brand name
FC-R7800 Series
Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing processes, various inspection/analysis equipment, internal combustion engines, film deposition devices, fuel cells, liquid crystal displays, optical fibers, organic EL, environmental measurement, bio, food.
