Digital Mass Flow Controller Aera Transformer
Inclusive communication and control! A versatile mass flow controller that contributes to cost reduction.
The "Aera Transformer" is a digital mass flow controller suitable for various applications such as CAD, PVD, diffusion, and etching. The thin film growth and etching characteristics produced by this product boast excellent homogeneity and high reproducibility. With outstanding responsiveness, accuracy, and reproducibility, it enhances the productivity and yield of the equipment. 【Features】 ■ Multi-gas, multi-range ■ High-speed responsiveness ■ 100% metal seal, high-purity design ■ Compatible with DeviceNet, RS-485, and analog control *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other Features】 ■Various warning and diagnostic functions ■RoHS compliant ■Field programmable* ■Various gas selections possible without recalibration* *Applicable only to multi-gas, multi-range Transformer MFC *For more details, please refer to the PDF materials or feel free to contact us.
Price information
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Delivery Time
Model number/Brand name
Transformer
Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing processes, various inspection/analysis equipment, internal combustion engines, film deposition devices, fuel cells, LCDs, optical fibers, organic EL, environmental measurement, biotechnology, food.
