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High-precision linear stage "True Nano Positioning"

[Demo unit available] Improved repeatability! A linear stage capable of position control at the nano level, minimizing errors. Usable in both upright and inverted positions!

The "True Nano Positioning" that we handle is a linear stage that pursues high precision with position control at the nanometer level. It can draw free curves in 3D with a 6-axis stage. With our unique 6D precision, we can measure the error between the target position and the actual position compared to traditional 2D based on ISO, and by minimizing this error, we achieve true nanometer-level repeatability. 【Features】 ■ Free combination of X-Y-Z-θx-θy-θz ■ True nanometer precision achieved through 6D Precision ■ Option for XY orthogonality of 1 arc second available ■ Vacuum option available *For more details, please download the catalog or contact us.

Related Link - http://www.autex-inc.co.jp/index.html

basic information

Main Product Lineup ■ Air Bearing Z Stage ■ Thin Hollow XY Stage ■ Compact XYZθ Stage *For more details, please download the catalog or contact us.

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