ALIO Industries XY Stage
True Nano Tech Thin High Rigidity Stage
The XY stage system by ALIO Industries has made an impact on high-end stage manufacturers worldwide with its three-plate design. Unlike the conventional method of combining single axes, this stage successfully achieves both high precision and high rigidity by integrating the XY axes into a single unit, making it a hallmark of ALIO Industries.
basic information
■Thin, high-rigidity design with three plates By orthogonally arranging high-precision cross rollers on both sides of the middle plate, we achieve high precision and high rigidity in a thin design. Regardless of the stroke, we realize a repeatability accuracy of ±30nm with next-generation standard 6D Point Precision. ■Standard upgrade with Ultra/Nano options A variety of upgrade options are available. Improved accuracy through laser mapping and enhanced precision of structural components. ■Adoption of high-performance motors/optical encoders By using top-tier products from leading manufacturers in Europe and the U.S., we achieve not only precision but also high reliability. MTBF > 100,000h. ■Direct assembly with various stages It is possible to directly mount over 400 types of stages without using adapter plates. This results in a multi-axis stage system compliant with 6D Point Precision. ●For more details, please contact us or download the catalog.
Price information
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