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Excel Precision High-Precision 6DOF Laser Interferometer

NIST/ISO compliant laser interferometer (displacement meter) capable of easy and precise measurement of up to 6 axes simultaneously.

In this laser interferometer system, a combination of optical modules allows for simultaneous high-precision measurement of up to 6 degrees of freedom (X, Y, Z, pitch, yaw, roll) from a single axis. The installation and alignment of the system are very simple. Additionally, it is possible to further improve accuracy by correcting the wavelength of the measurement laser using optional environmental sensors and refractometers. With over 5,000 installations, it has become the de facto standard worldwide in fields such as semiconductor manufacturing equipment like wafer and FPD steppers, CNC machines, and displacement measurement in motion systems, as well as research institutions in various countries.

Related Link - https://www.autex-inc.co.jp/products/6dof-laser-in…

basic information

Linear Positioning Measurement Range: ±5 m, Accuracy: 0.0005% (without wavelength correction), Resolution: 10 nm Yawing Measurement Range: ±3600 arc seconds: ±5° (angle correction), Accuracy: ±0.2% (relative to displayed value), Resolution: 0.1 arc seconds Pitching Measurement Range: ±3600 arc seconds: ±5° (angle correction), Accuracy: ±0.2% (relative to displayed value), Resolution: 0.1 arc seconds Rolling Measurement Range: ±3000 arc seconds: ±3° (angle correction), Accuracy: ±0.3% (relative to displayed value), Resolution: 0.5 arc seconds Levelness Measurement Range: ±500µm, Accuracy: ±2µm + 0.5µm/m, Resolution: 0.5µm Verticality Measurement Range: ±500µm, Accuracy: ±2µm + 0.5µm/m, Resolution: 0.5µm Vibration Measurement Range: ±500µm (simultaneously on X, Y, Z axes), Accuracy: ±2µm + 0.5µm/m, Resolution: 0.5µm Data Smoothing Processing Can be set between 10-75 seconds (depending on application)

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Applications/Examples of results

As optical components for interferometers, we have over 5,000 delivery records in fields such as semiconductor manufacturing equipment like wafer and FPD steppers, CNC machines in the machine tool sector, displacement measurement in motion systems, and various national standard research institutions, making us the de facto standard worldwide. We offer a wide range of optical systems for various applications, including linear interferometers, plane mirror interferometers, differential interferometers, single beam interferometers, angle interferometers, and straightness interferometers. We also provide vacuum-compatible interferometers, beam benders, and beam splitters.

Detailed information

Excel Precision High-Precision 6DOF Laser Interferometer

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