日本ベーカーヒューズ株式会社＆ベーカーヒューズ・エナジージャパン株式会社　 （旧）GEセンシング＆インスペクション・テクノロジーズ株式会社　＆　GEエナジー・ジャパン株式会社 Official site

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Druck TERPS: Innovative vacuum pressure measurement technology supporting the semiconductor industry.

日本ベーカーヒューズ株式会社＆ベーカーヒューズ・エナジージャパン株式会社　

日本ベーカーヒューズ株式会社＆ベーカーヒューズ・エナジージャパン株式会社　 （旧）GEセンシング＆インスペクション・テクノロジーズ株式会社　＆　GEエナジー・ジャパン株式会社

Overview and Features of TERPS • High Precision and Stability: Achieves a precision of ±0.01%FS and long-term stability of less than 0.01%FS per year, with temperature sensitivity significantly reduced through multi-point compensation. • Wide Measurement Range: Covers commonly used ranges from medium vacuum to atmospheric pressure for vacuum applications, providing a continuous measurement range from 10Pa to atmospheric pressure. • Excellent Linearity: Demonstrates very good linearity even in low-pressure regions, with positive/negative offset amounts stable at 21-23Pa in the range of 1Pa to 1000Pa. • Low Hysteresis: The single crystal silicon resonant beam exhibits negligible hysteresis in the range of 0 to 100Pa, providing high stability and reliability even in ultra-low pressure areas. • Robust Operating Temperature Range: Supports operating temperatures from -55℃ to 125℃. • High Media Compatibility: Depending on the measurement medium, options include direct exposure silicon elements, 316L stainless steel isolation diaphragms, or Hastelloy C276 specifications. • Easy System Integration: Compatible with frequency output or digital output (RS232/RS485, CANBus, USB), facilitating easy system integration.

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  • Pressure【For Meteorological Applications】High-Precision Pressure Sensor TERPS 8100

    It is also possible to customize to meet the customer's specific OEM requirements! It operates without issues even in harsh environments.

    【Other Features】 ■ Barometer pressure with an accuracy of ±0.1 mbar (0.1 hPa) across the correction temperature range ■ Configurable pressure range (e.g., 500 to 1080 mbar, 750 to 1150 mbar) ■ Multiple output configurations (TTL and diode, RS-232 and RS-485) ■ Various pressure and electrical connections *For more details, please refer to the PDF document or feel free to contact us.

  • Druck High-Precision Silicon Vibrating Pressure Sensor TERPS 8000

    Achieving excellent stability and high precision! This is a pressure sensor with a structure that isolates the sensor element from the pressure medium.

    【Other Features】 ■ High Precision: ±0.01% FS (non-linearity, hysteresis, repeatability, temperature characteristics) ■ Excellent Long-term Stability: ±0.01% FS/Year ■ Pressure Range: 200kPa (abs) to 7MPa (abs) and atmospheric pressure ■ Wide Temperature Range: -40℃ to +85℃ ■ TTL frequency and diode voltage analog output or RS-232, RS-485 digital output ■ Various pressure fittings and electrical connection connectors *For more details, please refer to the PDF document or feel free to contact us.

  • High-Precision Pressure Module 'PM620 TERPS'

    Hand-tightening possible without tools! High-accuracy pressure module that can measure from 1.2 bar to 100 bar.

    【Specifications (Excerpt)】 ■Allowable operating pressure: 110% FS ■Water and dust resistance: IP65 (dust-tight, protected against water jets) ■Operating temperature: -10 to 50°C ■Storage temperature: -20 to 70°C ■Humidity: 0 to 90% RH (no condensation) ■EMC: BS EN 61326-1 ■Electrical safety: BS EN 61010-1 *For more details, please refer to the PDF document or feel free to contact us.

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