Simplex Heater for Semiconductor Film Deposition
Infrared heater that achieves high-efficiency heating even at a distance of 100mm.
In the semiconductor industry's film deposition process, a uniform temperature distribution and precise temperature control are required. In particular, when the distance between the substrate and the heat source increases, heating efficiency decreases, making it easier for temperature variations to occur. These temperature variations can compromise the uniformity of the film deposition and potentially lead to a decline in product quality. The Simplex Heater employs a parallel beam infrared heater module, achieving high-efficiency heating even at a distance of 100mm. This helps suppress temperature variations in the film deposition process and contributes to the stabilization of product quality. 【Application Scenarios】 - Film deposition process - Substrate heating - Measures against temperature variations 【Effects of Implementation】 - Energy savings through improved heating efficiency - Stabilization of the process - Improvement in product quality
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【Features】 - Efficiently heats even at 100mm, compared to the conventional 2-30mm high-efficiency infrared heaters. - Adopts a parallel light type infrared heater module. - Improved cooling performance allows for operation without cooling or with air cooling. 【Our Strengths】 Chubu Electric Power Miraiz Co., Ltd. leverages the technical expertise and proposal capabilities cultivated through its energy business to support customers in solving their challenges. In addition to electricity and gas services, we also manufacture and sell energy-related equipment and provide consulting, offering optimal solutions from a broad perspective. Please feel free to contact us for inquiries.
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Chubu Electric Power Miraiz Co., Ltd. is a company that was spun off from Chubu Electric Power Co., Inc. as a sales business company within the Chubu Electric Power Group. We face our customers more closely and operate our business swiftly. By delivering new values and services, starting with the "Community Support Infrastructure" that can help solve various social issues, we aim to grow into a presence that enriches our customers' lives and supports their businesses. Please feel free to consult us when you need assistance.