High-efficiency, high-output electric infrared heater for semiconductor manufacturing
Ideal for wafer drying! Improve productivity with high-efficiency, high-output electric heaters.
In the semiconductor manufacturing industry, uniform and efficient heating is required during the wafer drying process. In particular, maintaining the quality of wafers with fine circuits necessitates precise temperature control and even heating. Conventional heating methods may face challenges such as low heating efficiency and temperature variations. Our electric infrared heater, the 'Simplex Heater,' addresses these issues and contributes to the efficiency and quality improvement of the wafer drying process. 【Usage Scenarios】 ■ Wafer drying process ■ Heating processes that require precise temperature control 【Benefits of Implementation】 ■ Improved heating efficiency ■ Stabilization of quality through reduced temperature variations ■ Increased productivity
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【Features】 - High efficiency even at a distance due to the shape of the reflective surface - Increased radiation amount due to surface treatment of the heat dissipation surface, allowing operation with fan air cooling even at high output - Wavelength selection possible according to the heated object by changing the heater tube - Achieves output of 150kW/m2 and heating efficiency of 68% under certain conditions - Customization of heater length and output is also possible - Capable of heating without thermal unevenness 【Our Strengths】 Chubu Electric Power Miraiz Co., Ltd. leverages the technical and proposal capabilities cultivated through its energy business to provide solutions that meet customer needs. We engage in a wide range of businesses, including the electric power industry, manufacturing and sales of energy-related machinery and equipment, and thermal supply services, supporting our customers' businesses from multiple angles. Please feel free to consult us when needed.
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Simplex Heater
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Chubu Electric Power Miraiz Co., Ltd. is a company that was spun off from Chubu Electric Power Co., Inc. as a sales business company within the Chubu Electric Power Group. We face our customers more closely and operate our business swiftly. By delivering new values and services, starting with the "Community Support Infrastructure" that can help solve various social issues, we aim to grow into a presence that enriches our customers' lives and supports their businesses. Please feel free to consult us when you need assistance.