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Silicon Wafer Edge Polisher [Made in Japan]

This is a new silicon wafer edge polishing device developed with the concept of space-saving and high throughput.

● High throughput polishing is possible without selecting wafers ● Improved processing surface accuracy ● Chemical-free polishing is possible ● Removal of various films is possible ● Can be introduced into each process of wafer manufacturing

Related Link - http://www.mipox.co.jp/products/application/silico…

basic information

In the wafer manufacturing process, the silicon wafer edge polisher that enables improved throughput and surface accuracy has been globally adopted. The silicon wafer edge polishers compatible with 6-inch, 8-inch, and 12-inch wafers use precision polishing tape, and thanks to our patented technology, they can always polish with a new abrasive surface, ensuring stable polishing power.

Price information

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Delivery Time

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Model number/Brand name

TUNeDGE

Applications/Examples of results

Silicon wafer edge polishers can be utilized for various applications. They are used in each manufacturing process of silicon wafers (after beveling, after etching, and for CVD film removal). They are also effective for reclaim applications and the removal of various metal films.

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