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[Vibration System for MEMS Sensor Development Compatible with Ultra High Frequency 350kHz]

An optimal vibration system for the development and shipping inspection of device products, including semiconductor components, supporting sine wave, sweep, and field data reproduction vibration.

【Basic Specifications】 - Frequency: 0.5Hz to 350kHz - Acceleration: up to 600m/s² - Maximum weight of test specimen: 25kg - Sine wave, sweep, and field data reproduction vibration - Can be combined with various tests such as low frequency, magnetic field, temperature, and acoustic testing * The values are maximum limits and depend on the equipment configuration and test content. 【Application Example 1: MEMS Sensor Development】 Supports ultra-high frequencies up to 350kHz, allowing for performance evaluation tests and exploration of natural frequencies and resonance frequencies. It can be combined with various environmental testing equipment such as magnetic field, temperature, and acoustic tests, enabling testing under various conditions. 【Application Example 2: Quality Control】 Suitable for shipping tests and inspections of base products, it is expected to improve quality standards by detecting defective products. The latest models "SE-16" and "SE-11" shakers can simultaneously vibrate up to five test specimens. 【Application Example 3: Modal Analysis】 In addition to high-frequency vibration analysis, low-frequency models can accommodate test specimens weighing up to 25kg, allowing for vibration tests as structural components. Vibration can also be conducted using actual vibration data for field reproduction tests, in addition to sine wave and sweep vibration.

F.I.T. Pacific Co., Ltd. HP

basic information

□■Manufacturer Information■□ SPEKTRA is a German manufacturer specializing in vibration and acoustic sensor calibration devices, producing from national primary standard calibration machines. It is certified by DAkkS (DKD) and can issue traceable certificates for calibration with primary standard calibration machines from PTB and NIST, and for private secondary use from PTB. We provide calibration systems that comply with international standards ISO 16063 and IEC. SPEKTRA leverages its many years of technology and experience gained in the manufacturing of vibration and acoustic calibration machines to offer cutting-edge solutions and services aimed at device development testing and high-quality management. The new model "SE-16" enhances our vibration systems for device testing. It is an optimal vibration system for next-generation MEMS sensor development, as well as for the development testing of base components, assembled products, and chips, and also suitable for shipment testing.

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Model number/Brand name

Ultra High Frequency Vibration Testing System

Applications/Examples of results

**Example Application 1: MEMS Sensor Development** It supports ultra-high frequencies up to 350 kHz, allowing for performance evaluation tests as well as the exploration of natural frequencies and resonance frequencies. It can be combined with various environmental testing devices such as magnetic fields, temperature, and acoustics, enabling tests under various conditions. **Example Application 2: Quality Control** It is suitable for shipping tests and inspections of base products, and it is expected to improve quality standards by detecting defective products. The latest models, "SE-16" and "SE-11" shakers, can simultaneously vibrate up to five test items. **Example Application 3: Modal Analysis** In addition to vibration analysis at high frequencies, low-frequency models can accommodate test items weighing up to 25 kg, allowing for vibration testing as a structural entity. Vibration can be performed not only with sine waves and sweep vibrations but also by incorporating actual vibration data for field reproduction tests. We will select configurations based on other applications and provide guidance. Please feel free to consult with us.

Vibration system for MEMS sensor development testing and shipping inspection with vibration frequency from 0.5Hz to 350kHz.

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Shaker for device development testing and shipping inspection up to 100 kHz frequency, capable of testing up to 5 samples simultaneously.

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