[Exhibition] 12/17 to 12/19 "SEMICON Japan 2025" Exhibition Information

Fujikin Incorporated

We will be exhibiting at the international exhibition for semiconductor manufacturing equipment and materials, "SEMICON Japan 2025." At our booth, we will showcase valves and fluid control devices that are essential for semiconductor manufacturing equipment, featuring high airtightness and high durability, as well as our "high throughput process gas supply valve" that supplies process gases quickly and stably to manufacturing equipment. ＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝ Additionally, we will hold a "Fitting Installation Experience Session"!! At the Fujikin exhibition booth, an instructor will provide a hands-on explanation while using the fittings. (Participation is free) Target products: V-Lok, UJR/UPG, IGS We will discuss the fundamentals that are usually not covered, so whether you are a beginner or a veteran, we invite you to join us. ＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝＝ ★ Furthermore, we are currently running a visit campaign exclusively for "CLUB FUJIKIN" members, where you can receive handy goods! Please take this opportunity to register and come visit us!

Date and time Wednesday, Dec 17, 2025 ～ Friday, Dec 19, 2025
10:00 AM ～ 05:00 PM
Capital Tokyo Big Sight South Hall 1 S1703
Entry fee Free Advance registration is required for attendance.

Related product information

Fujikin Co., Ltd. "Sencent Valve" IoT Valve
Sensing the opening and closing of the valve!

■ Ultra-Compact IoT Valve for Semiconductor Manufacturing Equipment By equipping an ultra-compact diaphragm valve with a small sensor, we have achieved IoT integration with an ultra-compact IGS (Integrated Gas Supply System), enabling accurate open/close detection. - Durability: 4 million cycles (experimental value) - Operating temperature: -10 to +80℃ *Awarded the 19th Ultra Monozukuri Parts Grand Prize in the Machinery and Robotics Parts category in 2022! ■ High-Durability IoT Valve By equipping a high-durability valve with a sensor, stable sensing has become possible. - Durability: 100 million cycles (experimental value) - Operating temperature: -10 to +80℃ ■ High-Temperature, High-Durability IoT Valve By equipping a high-durability valve with a high-temperature compatible sensor, stable sensing is possible even under high-temperature conditions. - Durability: 30 million cycles (experimental value) - Operating temperature: -10 to +150℃
Valve [Metal Diaphragm Valve] NEW MEGA series (F)
<FINE series PURE> is a direct diaphragm valve for ultra-high purity use.

<Specifications> Maximum Operating Pressure (MPa): 1/20.5 Operating Fluid Temperature Range (°C): -10 to +80 / -10 to +40 Key Material: Stainless Steel Connection Method: Union Type / 2 Compression Ring Type / Welding Type Nominal Diameter: 6.35 mm to 12.7 mm
Union gasket type joint UJR joint (FS)
<FINE series PURE> is a metal gasket type fitting for ultra-high purity applications.

<Specifications> Maximum operating pressure (MPa): 10/16.2/21.5 Operating fluid temperature range (°C): -196 to +450 Main material: Stainless steel Connection method: Union gasket type Nominal diameter: 3.2 mm to 19.05 mm
Union gasket type joint UPG joint (FS)
This is a super high purity, ultra-small metal gasket type joint for ultra-high purity use.

<Specifications> Maximum operating pressure (MPa): 21.5 Operating fluid temperature range (°C): -196 to +450 Key material: Stainless steel Connection method: Union gasket type Nominal diameter: 3.2 mm to 12.7 mm
System [Flow Control Device] FCS Pressure Series
This is a flow control device that adopts a pressure control method for ultra-high purity applications.

1. The control flow is not affected by fluctuations in supply pressure. 2. Fast response time (less than 0.5 seconds) 3. Excellent accuracy (within ±1.0% S.P. for standard type) 4. Equipped with MGMR (Multi-Gas Multi-Range) function 5. Not affected by installation position. 6. Equipped with flow self-diagnosis function 7. Does not select gas types 8. RoHS compliant
【2 Compression Ring Type Joint】 New V-Lok
The <New V-Series> is a tube connector with excellent performance and quality.

<Specifications> Maximum operating pressure (MPa): 12 to 83.2 Operating fluid temperature range (°C): -196 to +537 Main material: Stainless steel Connection method: 2 compression ring type Nominal diameter: 1.6 mm to 25.4 mm
System [Integrated Gas System] IGS(FS)
The <FINE series PURE> is a highly pure, integrated gas system.

<Flow of IGS Panel Completion> 1. IGS Design 2. Component Selection and Arrangement 3. Base Block Setup 4. Upper Equipment Installation 5. Construction Completion