2017 7th Monozukuri Japan Award Minister of Economy, Trade and Industry Award (Product and Technology Development Category) awarded to Faribas, with 7 developers receiving the award.
Fujikin Incorporated
2017 7th Monozukuri Japan Award Minister of Economy, Trade and Industry Award (Product and Technology Development Category) awarded to 7 developers of Faribas. 2015 12th Super Monozukuri Parts Award (Encouragement Award) awarded product. 2011 6th Monozukuri Collaboration Award (Special Award) awarded product. The developers of Fujikin's liquid material vapor supply system "Faribas" (2017 7th Monozukuri Japan Award Minister of Economy, Trade and Industry Award [Product and Technology Development Category]) developed the world's first system that directly vaporizes (gasifies) liquid organic metal, the raw material, without using carrier gases such as helium (hereafter referred to as He), precisely controls pressure fluctuations, and supplies a constant amount to silicon wafers to form thin films. Compared to the conventional method that dilutes with carrier gas, productivity has significantly improved (high flow supply at 100% concentration, reduced operating costs, shortened process time, and miniaturization of the system), contributing to the manufacturing of next-generation semiconductors, including larger diameter wafers and higher integration of circuits.
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