System [Flow Control Device] FCS Thermal Series
This is a flow control device that adopts a thermal flow sensor control method.
Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
basic information
Achieved further total cost reduction and shortened lead time Mass flow controller equipped with a digital interface 【Features】 ○ High precision Flow accuracy of ±1% achieved ○ High-performance sensor Adoption of low-temperature flow sensors realizes optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve minimizes contact gas area and prevents particle generation Equipped with high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
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Please refer to the detailed product catalog.
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News about this product（11）
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[Catalog Update] Needle Stop Valve / Metal Diaphragm Valve / UJR Fitting / UPG Fitting / FCS-T / FCS-P
The catalog has been revised. Valves "NEW US-VALVES Manben-kun Needle Stop Valve" "Metal Diaphragm Valve NEW MEGA series" Fittings "Metal Gasket Fitting UJR Fitting & Automatic Welding Fitting" "High-Performance Ultra-Compact Gasket Fitting UPG Fitting" Systems "Mass Flow Controller FCS Thermal Series" "Flow Control System FCS Pressure Series" Please check the related product information.
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[Exhibition] 9/18 to 9/20 "VACUUM2024 Vacuum Exhibition" Exhibition Information
We will be exhibiting at Japan's largest vacuum equipment and vacuum device comprehensive exhibition, "VACUUM2024." At our booth, we will showcase a variety of products suitable for vacuum lines that require ultra-high purity and high airtightness, including the mass flow controller "FCS Pressure Series." Scheduled products for exhibition: - FCS Pressure Series - FCS Thermal Series - Integrated Gas System (IGS) - New V-Lok - PURE Series, etc. ★ A special campaign is currently underway for "CLUB FUJIKIN" members, where you can receive handy goods just for visiting! Please take this opportunity to register and come see us!
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[Exhibition] 11/29 - 12/1 "VACUUM2023 Vacuum Exhibition" Exhibition Information
We will be exhibiting at the comprehensive exhibition "VACUUM2023," where Japan's largest cutting-edge vacuum technology will gather. At our booth, we will showcase a variety of products suitable for vacuum lines that require ultra-high purity fluids and high airtightness, including the mass flow controller "FCS Pressure Series." <Exhibited Products> - FCS Pressure Series - FCS Thermal Series - Integrated Gas System (IGS) - New V-Lok - PURE Series, etc. ★ Additionally, we are running a visit campaign exclusively for "CLUB FUJIKIN" members, where you can receive handy goods without fail! Please take this opportunity to register and visit us!
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[Exhibition] 9/20 to 9/22 "INCHEM TOKYO 2023" Exhibition Information
We will be exhibiting at the comprehensive exhibition "INCHEM TOKYO 2023," where the latest chemical engineering technologies come together. At our booth, we will showcase control valves that enable precise control, "ultra-high-pressure hydrogen gas compatible valve equipment" for a hydrogen society, fittings, and fluid control devices. <Featured Product> 1. SR100 A proportional solenoid actuator that can switch from fully closed to fully open in less than 0.6 seconds, enabling very fast positioning control. ★ Additionally, we are running a visitor campaign exclusively for "CLUB FUJIKIN" members, where you can receive handy goods without fail! We encourage you to register and visit us during this opportunity!
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【Exhibition】9/6 to 9/8 "JASIS 2023" Exhibition Information
We will be exhibiting at "JASIS 2023," one of the largest exhibitions in Asia related to analysis and measurement. At our booth, we will showcase systems used in gas analyzers and supply systems, as well as various fittings and valves for metal surface treatment products. <Featured Products> 1. Next-Generation Automatic Analysis Sampling System Automates the instant switching of multiple gas lines in analyzers and the pre- and post-analysis processes! 2. Integrated Gas System (IGS) Achieves a compact and high-performance gas supply system! ★ Additionally, we are running a visit campaign exclusively for "CLUB FUJIKIN" members, where you can receive handy goods without fail! Please take this opportunity to register and visit us!
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Fujikin is a cutting-edge manufacturer of ultra-precision fluid control systems, focusing on specialized valve equipment. Since its founding in 1930, the company has consistently challenged the limits and made it its corporate policy to exceed the ultimate in technology. We support people's lives and society across a wide range of fields, including semiconductors, hydrogen, pharmaceuticals, analysis and measurement, and space. We will continue to contribute to a sustainable society through comprehensive technology in fluid control equipment and systems. Please feel free to contact us if you have any inquiries.