System [Flow Control Device] FCS Thermal Series
This is a flow control device that adopts a thermal flow sensor control method.
Achieved further total cost reduction and shortened lead time with a digital interface-equipped mass flow controller. 【Features】 ○ High precision Flow accuracy of ±1% ○ High-performance sensor Adoption of low-temperature flow sensors, achieving optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve with reduced gas contact area and prevention of particle generation Adoption of high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
basic information
Achieved further total cost reduction and shortened lead time Mass flow controller equipped with a digital interface 【Features】 ○ High precision Flow accuracy of ±1% achieved ○ High-performance sensor Adoption of low-temperature flow sensors realizes optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve minimizes contact gas area and prevents particle generation Equipped with high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
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Please refer to the detailed product catalog.
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News about this product（5）
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[Catalog Update] Needle Stop Valve / Metal Diaphragm Valve / UJR Fitting / UPG Fitting / FCS-T / FCS-P
The catalog has been revised. Valves "NEW US-VALVES Manben-kun Needle Stop Valve" "Metal Diaphragm Valve NEW MEGA series" Fittings "Metal Gasket Fitting UJR Fitting & Automatic Welding Fitting" "High-Performance Ultra-Compact Gasket Fitting UPG Fitting" Systems "Mass Flow Controller FCS Thermal Series" "Flow Control System FCS Pressure Series" Please check the related product information.
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[Exhibition] 9/18 to 9/20 "VACUUM2024 Vacuum Exhibition" Exhibition Information
We will be exhibiting at Japan's largest vacuum equipment and vacuum device comprehensive exhibition, "VACUUM2024." At our booth, we will showcase a variety of products suitable for vacuum lines that require ultra-high purity and high airtightness, including the mass flow controller "FCS Pressure Series." Scheduled products for exhibition: - FCS Pressure Series - FCS Thermal Series - Integrated Gas System (IGS) - New V-Lok - PURE Series, etc. ★ A special campaign is currently underway for "CLUB FUJIKIN" members, where you can receive handy goods just for visiting! Please take this opportunity to register and come see us!
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[Exhibition] 11/29 - 12/1 "VACUUM2023 Vacuum Exhibition" Exhibition Information
We will be exhibiting at the comprehensive exhibition "VACUUM2023," where Japan's largest cutting-edge vacuum technology will gather. At our booth, we will showcase a variety of products suitable for vacuum lines that require ultra-high purity fluids and high airtightness, including the mass flow controller "FCS Pressure Series." <Exhibited Products> - FCS Pressure Series - FCS Thermal Series - Integrated Gas System (IGS) - New V-Lok - PURE Series, etc. ★ Additionally, we are running a visit campaign exclusively for "CLUB FUJIKIN" members, where you can receive handy goods without fail! Please take this opportunity to register and visit us!
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[Exhibition] 9/20 to 9/22 "INCHEM TOKYO 2023" Exhibition Information
We will be exhibiting at the comprehensive exhibition "INCHEM TOKYO 2023," where the latest chemical engineering technologies come together. At our booth, we will showcase control valves that enable precise control, "ultra-high-pressure hydrogen gas compatible valve equipment" for a hydrogen society, fittings, and fluid control devices. <Featured Product> 1. SR100 A proportional solenoid actuator that can switch from fully closed to fully open in less than 0.6 seconds, enabling very fast positioning control. ★ Additionally, we are running a visitor campaign exclusively for "CLUB FUJIKIN" members, where you can receive handy goods without fail! We encourage you to register and visit us during this opportunity!
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[News Release] Awarded for 18 consecutive years! We have received the "Super" Manufacturing Parts Award in the Machinery and Robot Parts category!
Thanks to your support, we have received the "Super" Monozukuri Parts Award for 18 consecutive years. In 2021, at the 18th "Super" Monozukuri Parts Award, the "Pressure-Controlled Ultra-High-Precision Gas Flow Controller (FCS-P8500)" won the "Mechanical and Robot Parts Award." Thank you very much. The "Pressure-Controlled Ultra-High-Precision Gas Flow Controller (FCS-P8500)" is a newly developed flow controller by Fujikin for semiconductor manufacturing processes. It expands the rangeability by 10 times while maintaining the same housing size as conventional models and improves flow control accuracy by 40 times. Product details will be published on our website as they become available!
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Fujikin is a cutting-edge manufacturer of ultra-precision fluid control systems, focusing on specialized valve equipment. Since its founding in 1930, the company has consistently challenged the limits and made it its corporate policy to exceed the ultimate in technology. We support people's lives and society across a wide range of fields, including semiconductors, hydrogen, pharmaceuticals, analysis and measurement, and space. We will continue to contribute to a sustainable society through comprehensive technology in fluid control equipment and systems. Please feel free to contact us if you have any inquiries.