System [Moisture Generation Device] WVG(FS)
<FINE series PURE> is a water generation device that utilizes catalytic reactions for ultra-high purity applications.
<Features> 1. Reaction furnace utilizing a catalyst. 2. Wide range of concentration control. 3. Excellent safety. 4. Various interlocks. 5. Safety specifications.
basic information
Please refer to the detailed product catalog.
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Applications/Examples of results
The WVG from Fujikin can be used in various process applications in thermal treatment devices such as diffusion devices and RTP devices.
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Fujikin is a cutting-edge manufacturer of ultra-precision fluid control systems, focusing on specialized valve equipment. Since its founding in 1930, the company has consistently challenged the limits and made it its corporate policy to exceed the ultimate in technology. We support people's lives and society across a wide range of fields, including semiconductors, hydrogen, pharmaceuticals, analysis and measurement, and space. We will continue to contribute to a sustainable society through comprehensive technology in fluid control equipment and systems. Please feel free to contact us if you have any inquiries.