Ultra-precision pressure reducing valve "RS/RR Series"
High precision and excellent resolution, air regulator specialized in pressure characteristics.
● The unique structure allows for easy fine pressure adjustments. ● Due to its excellent relief sensitivity, high-precision pressure control is possible. ● We also offer models that support pressure adjustment via external signals.
basic information
Adopting a servo balance method utilizing a rolling diaphragm and a measuring capsule for pressure control. ● Excellent Characteristics The relief characteristics, pressure characteristics, and flow characteristics are exceptionally good. ● Manifold Compatibility Manifold piping is possible. (Includes a dedicated fluororubber gasket) ● High Precision High-precision pressure control is achievable. (Sensitivity 0.1% F.S., repeatability ±0.1% F.S.) ● Long-term Pressure Stability Once set, the pressure remains stable with minimal fluctuations over a long period. Clean Specification ● The component composition is made of stainless steel, fluororubber, and all other parts are treated with electroless nickel plating, resulting in extremely low dust generation. All gas contact parts are assembled with pure water cleaning and without lubrication, ensuring no oil contamination in the passing air. Exhaust piping can be connected to the relief and bleed holes, allowing relief air and bleed air to be exhausted outside the cleanroom.
Price information
The price varies depending on the quantity, so please feel free to contact us.
Delivery Time
Applications/Examples of results
For semiconductor and FPD manufacturing equipment ● Pressure control for self-weight cancellation air cylinders ● Pressure control for precision pressing air cylinders ● Pressure control for chemical liquid tanks ● Pressure control for air springs
