Passive Vibration Isolation Table for Semiconductor Manufacturing
High-performance vibration isolation table that improves the precision of microfabrication.
In the semiconductor manufacturing industry, especially in fine processing, even minor external vibrations can significantly impact product quality. If the processing accuracy is even slightly off, it can lead to reduced yield and an increase in defective products, potentially resulting in substantial losses. Our passive vibration isolation table addresses vibration issues in fine processing and supports a stable production system. 【Usage Scenarios】 - Exposure equipment - Scanning Electron Microscope (SEM) - Atomic Force Microscope (AFM) - Wafer Prober 【Benefits of Implementation】 - Improved processing accuracy - Enhanced yield - Reduction in defective products - Assurance of stable productivity
basic information
**Features** - Excellent vibration isolation characteristics can be designed according to the load capacity. - High damping performance achieved through a unique damping mechanism. - Easy to miniaturize, with size proposals tailored to applications. - Proven performance even in cleanroom environments over many years. - No degradation of characteristics due to the combination of springs and a unique damping mechanism, allowing for semi-permanent use. **Our Strengths** We manufacture and sell products utilizing various rubber products and composite (integration) technologies, enabling designs tailored to customer specifications.
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Applications/Examples of results
Electron microscope Semiconductor manufacturing equipment
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In addition to industrial rubber parts, we are widely engaged in various fields such as fluid control equipment, vibration isolation tables and related equipment, printing machinery, electrical and electronic devices, rescue and lifesaving equipment, and the manufacturing and sales of golf carbon shafts.