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Passive Vibration Isolation Table for Electronic Devices

High-performance vibration isolation table that improves the precision of microfabrication.

In the semiconductor manufacturing industry, especially in electronic devices, even minor external vibrations can significantly impact product quality. If precision is even slightly off, it can lead to reduced yield and an increase in defective products, potentially resulting in substantial losses. Our passive vibration isolation table addresses vibration issues in fine control and supports a stable production system. 【Application Scenes】 - Exposure equipment - Scanning Electron Microscope (SEM) - Atomic Force Microscope (AFM) - Wafer Prober 【Effects of Implementation】 - Improved processing accuracy - Enhanced yield - Reduction of defective products - Assurance of stable productivity

Related Link - https://www.fujikura-control.com/product_info/inde…

basic information

**Features** - Excellent vibration isolation characteristics can be designed according to the load capacity. - High damping performance achieved through a unique damping mechanism. - Easy to miniaturize, with size proposals tailored to applications. - Proven performance in cleanroom environments for many years. - No degradation of characteristics due to the spring and unique damping mechanism, allowing for semi-permanent use. **Our Strengths** We manufacture and sell products utilizing various rubber products and composite (integration) technologies, enabling designs tailored to customer specifications.

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Please contact us for details

Consultation required depending on specifications.

Applications/Examples of results

Electron microscope Semiconductor manufacturing equipment

Passive vibration isolation table

PRODUCT

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Distributors

In addition to industrial rubber parts, we are widely engaged in various fields such as fluid control equipment, vibration isolation tables and related equipment, printing machinery, electrical and electronic devices, rescue and lifesaving equipment, and the manufacturing and sales of golf carbon shafts.