Zero Friction Air Bearing Cylinder for Semiconductor Manufacturing
Supports precise positioning in semiconductor manufacturing. Achieves high precision with zero friction.
In the semiconductor manufacturing industry, high precision and a clean environment are required for the positioning of wafers and substrates. Particularly in fine processing and assembly processes, even slight friction or dust generation can significantly impact product quality. Air bearing cylinders address these challenges by providing zero friction resistance and compatibility with clean room environments. With precise positioning control and high durability, they contribute to improving the quality of semiconductor manufacturing. 【Application Scenarios】 - Wafer transport - Precision polishing equipment - Inspection equipment - Assembly processes 【Benefits of Implementation】 - High-precision positioning - Improved product quality - Reduction of defective products - Compatibility with clean room environments
basic information
【Features】 - By adopting air bearings in the guide sections of the piston and rod, friction resistance is reduced to zero. - The use of porous metal sintered air bearings provides higher lateral rigidity compared to conventional products. - Special adaptations are possible through free design. - The air bearing cylinder "rotational constraint specification (double-acting type)" improves quality, reduces defective products, and offers high durability. - The air bearing cylinder "copper ion-free type" supports a copper ion-free environment. 【Our Strengths】 We manufacture and sell various rubber products and products utilizing composite (composite) technology. Leveraging the technology developed through the design and manufacturing of fluid control devices, including air cylinders, we provide products tailored to meet our customers' needs.
Price information
The price varies depending on the quantity, so please feel free to contact us.
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Applications/Examples of results
It is adopted in devices that require precision and accuracy. ● Self-weight cancellation of the processing head and sensor head (balancer) ⇒ LCD bonding, three-dimensional measuring machines ● Precision pressure control ⇒ Various bonding, mounting devices, and peripheral equipment for semiconductor and LCD manufacturing ● Machine tools ⇒ Nano processing machines, polishing machines, welding machines, etc. ● Tension control ⇒ For high-performance fiber processing machines By combining with our regulators [RS][RS.M/S], more advanced control becomes possible.
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In addition to industrial rubber parts, we are widely engaged in various fields such as fluid control equipment, vibration isolation tables and related equipment, printing machinery, electrical and electronic devices, rescue and lifesaving equipment, and the manufacturing and sales of golf carbon shafts.