Ultra-compact double-acting air bearing cylinder for semiconductor manufacturing
Zero friction resistance! Air bearing cylinder that achieves high speed.
In the semiconductor manufacturing industry, high-precision positioning and a clean environment are essential. Particularly in the transportation of wafers and substrates, as well as in precise assembly processes, the generation of fine dust and positional shifts due to friction significantly affect product quality. Conventional cylinders have faced challenges with sliding resistance and dust generation. This product utilizes air bearing technology to achieve non-contact between the rod and guide, resulting in zero friction resistance. Furthermore, it is compatible with clean room environments, meeting the stringent requirements of semiconductor manufacturing. 【Application Scenarios】 - Wafer transportation - Precision polishing equipment - Positioning of semiconductor manufacturing equipment 【Benefits of Implementation】 - Achieves high-precision positioning - Reduces dust generation, contributing to improved product quality - Compatible with clean room environments
basic information
【Features】 - Zero friction resistance: Achieved non-contact between the rod and guide using air bearings - High precision operation: Capable of precise drive at low load and low speed - Clean room compatible: Reduces dust generation and ensures food safety - Customizable design: Supports miniaturization, slim design, and special materials - High lateral rigidity: Adoption of porous metal sintered air bearings 【Our Strengths】 We provide products utilizing various rubber products and composite technology. Customization to meet customer needs is also possible.
Price information
The price varies depending on the quantity, so please feel free to contact us.
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Applications/Examples of results
It is adopted in devices that require precision and accuracy. ● Self-weight cancellation of the processing head and sensor head (balancer) ⇒ LCD lamination, three-dimensional measuring machines ● Precision pressure control ⇒ Various bonding, mounting devices, and peripheral equipment for semiconductor and LCD manufacturing ● Machine tools ⇒ Nano processing machines, polishing machines, welding machines, etc. ● Tension control ⇒ For high-performance fiber processing machines By combining with our regulators [RS][RS.M/S], more advanced control becomes possible.
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In addition to industrial rubber parts, we are widely engaged in various fields such as fluid control equipment, vibration isolation tables and related equipment, printing machinery, electrical and electronic devices, rescue and lifesaving equipment, and the manufacturing and sales of golf carbon shafts.