ACS-4-5 Ultra-Compact Air Bearing Cylinder for Semiconductor Manufacturing
An air cylinder with zero friction resistance that contributes to the precise control of semiconductor manufacturing.
In the semiconductor manufacturing industry, high-precision positioning and a clean environment are essential. Particularly in the transportation of wafers and substrates, as well as in precise assembly processes, the generation of fine dust and positional shifts due to friction significantly affect product quality. Traditional cylinders have faced challenges with sliding resistance and dust generation. This product utilizes air bearing technology to achieve non-contact between the rod and guide, resulting in zero friction resistance. Furthermore, it is compatible with clean room environments, meeting the stringent requirements of semiconductor manufacturing. 【Usage Scenarios】 - Wafer transportation - Precision polishing equipment - Positioning of semiconductor manufacturing equipment 【Benefits of Implementation】 - Achieves high-precision positioning - Reduces dust generation, contributing to improved product quality - Compatible with clean room environments
basic information
【Features】 - Industry's smallest and lightest class - Non-contact structure with zero friction resistance - High-precision positioning - Smooth operation - A wide range of standard products with various strokes 【Our Strengths】 Product development capabilities utilizing various rubber products and composite technologies, along with flexible responsiveness to customer needs.
Price information
The price will vary depending on the quantity. It will be approximately 100,000 yen per unit for a lot of 10 units. Please contact us for more details.
Price range
P2
Delivery Time
OTHER
It has been about two months. Please contact us for more details.
Applications/Examples of results
Fields that require advanced precision control, such as semiconductor manufacturing equipment, medical devices, optical equipment adjustment, and measurement and analysis instruments.
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In addition to industrial rubber parts, we are widely engaged in various fields such as fluid control equipment, vibration isolation tables and related equipment, printing machinery, electrical and electronic devices, rescue and lifesaving equipment, and the manufacturing and sales of golf carbon shafts.