Low metal and low particle solutions for electronic components.
We will contribute to the improvement of quality in semiconductor manufacturing!
In the electronic components industry, the quality of semiconductor materials has become crucial due to the increasing functionality of products. In particular, the contamination of metal impurities and particles can lead to performance degradation and reduced yield. Our products address these challenges through adsorption and filtration technologies used in semiconductor material manufacturing. 【Application Scenarios】 - Removal of metal impurities in the semiconductor manufacturing process - Reduction of particles in semiconductor materials 【Benefits of Implementation】 - Improvement in product quality - Enhancement of yield - Provision of reliable products
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【Features】 - Management of metal concentration at the ppb level - Management of particle counts up to approximately 100nm in diameter - Maximum processing capacity: 15L (low metal content), 18L (low particle content) *Scale-up under consideration - Metal reduction methods: adsorbents, filters - Particle reduction method: circulating filtration of PGMEA 【Our Strengths】 Fukui Canon Materials Co., Ltd. aims to enhance the comfort of our customers' daily lives through chemical technology. We possess our own ICP-MS (Inductively Coupled Plasma Mass Spectrometer) and liquid particle counters, and we create products that meet customer needs through innovative technologies and ideas, striving for sustainable development.
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Applications/Examples of results
Low metalization achievement: Reduced metal concentration from 2000 ppb to 50 ppb. Low particle achievement: In the circulation filtration of PGMEA (4L), particles larger than 70 nm were reduced from 4687 particles/mL to 0.3 particles/mL in 10 hours.
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Fukui Canon Material Co., Ltd. aims to enhance the comfort of our customers' daily lives through chemical technology, building better relationships between people and between people and chemistry with excellent technology. Under the philosophy of "coexistence," we strive to harmonize the global environment with corporate activities, meet the expectations of our customers, employees, and local communities, and create products that respond to customer needs through innovative technologies and ideas, aiming for sustainable development.






























