Optimal TOC decomposition for ultrapure water production - UV oxidation system [for semiconductor industry]
Ultra-high power ultraviolet oxidation equipment for the electronics and semiconductor industries! Supports TOC reduction in the ppb range!
The water used in the semiconductor industry is becoming increasingly purified, and the requirements for the concentration of organic substances (TOC) in ultra-pure water are becoming stricter. The "CX Series" is an ultra-high-output ultraviolet oxidation device that efficiently irradiates vacuum ultraviolet light (184.9 nm) generated from high-output low-pressure mercury lamps to oxidize and decompose organic substances in water. It is suitable for reducing TOC levels in the ppb range. 【Features】 - Ultraviolet oxidation device necessary for the production of ultra-pure water used in the semiconductor industry - Oxidizes and decomposes organic substances in water using 184.9 nm vacuum ultraviolet light - Enables high purification of ultra-pure water by reducing TOC levels in the ppb range - Useful in processes that improve yield in semiconductor and liquid crystal panel manufacturing *For more details, please download the PDF or feel free to contact us.
basic information
【Specifications (Partial)】 ■ Number of lamps: 3, 4, 6, 8, 12, 16, 20, 24, 28, 32, 36, 40 ■ Lamp lifespan: 9000 hours of continuous lighting ■ Maximum operating pressure: 1 MPa ■ Input voltage: AC 200V ±10% 50/60Hz compatible ■ Material/Finish of wetted parts: SUS316L with internal and external acid cleaning ■ Start method: Single action/Linked action ■ Model selection: Model selection is conducted based on TOC concentration and treatment flow rate *For more details, please download the PDF or feel free to contact us.
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Model number/Brand name
CX Series
Applications/Examples of results
【Applications】 ■Semiconductor industry ■Electronics industry *For more details, please download the PDF or feel free to contact us.
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Our company recognized the usefulness of ultraviolet sterilization devices early on in Japan and has been dedicated to developing products that meet customer needs for many years since we developed a water ultraviolet sterilization device as a new sterilization method in fields where conventional heating or chemical treatment was not possible. Please feel free to contact us if you have any requests.