Fluororesin diaphragm valve for slurry/high-purity fluids
Fluororesin diaphragm valve ideal for abrasive fluids such as slurries.
This is a fluororesin valve designed for chemical piping in semiconductor manufacturing equipment and chemical plants. It features a diaphragm valve structure with low resistance, making it ideal for viscous liquids such as CMP slurry. Due to its low-resistance design, it can offer flow capacity more than twice that of competitors in certain sizes. Additionally, the body shape minimizes liquid accumulation, reducing the risk of contamination.
basic information
- Maintenance-free PVDF piston actuator - Three types of operation: manual, normally closed, normally open, and double acting - Various limit switches and positioners can be installed 【Size】1/4" to 1-1/4" 【Applicable fluids】Corrosive and inert gases and liquids 【Fluid temperature】-10 to 150℃ 【Operating pressure】Max 0.6MPa 【Ambient temperature】Max 60℃ 【Body material】PFA, PVDF, PP 【Diaphragm material】Contact part PTFE / Back rubber EPDM 【Connection】Flare, space saver, pillar, butt welding, union, prime lock
Price range
Delivery Time
Model number/Brand name
GEMÜ CleanStar C60/C67
Applications/Examples of results
- Wafer cleaning, etching, and coating processes - Mixing, transportation, and supply of CMP slurry - Chemical injection process for water treatment and wastewater treatment - Chemical supply in the wet process of semiconductor manufacturing - Secondary processes in pharmaceuticals, food, and biotechnology fields - Supply of high-purity solvents
Detailed information
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3-way switching valve type This is a 3-way switching valve that minimizes dead space. It can be used as a mixing valve or a manifold valve.
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T-type body type The T-shaped structure minimizes liquid pooling, allowing for one less T-fitting. It can be used as a sampling valve.
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High-Flow Body Type This is a high flow type body with a Cv value that can be up to twice that of standard products.
