Fluororesin diaphragm valve for slurry/high-purity fluids
Fluororesin diaphragm valve ideal for abrasive fluids such as slurries.
This is a fluororesin valve designed for chemical piping in semiconductor manufacturing equipment and chemical plants. It features a diaphragm valve structure with low resistance, making it ideal for viscous liquids such as CMP slurry. Due to its low-resistance design, it can offer flow capacity more than twice that of competitors in certain sizes. Additionally, the body shape minimizes liquid accumulation, reducing the risk of contamination.
basic information
- Maintenance-free PVDF piston actuator - Three types of operation: manual, normally closed, normally open, and double acting - Various limit switches and positioners can be installed 【Size】1/4" to 1-1/4" 【Applicable fluids】Corrosive and inert gases and liquids 【Fluid temperature】-10 to 150℃ 【Operating pressure】Max 0.6MPa 【Ambient temperature】Max 60℃ 【Body material】PFA, PVDF, PP 【Diaphragm material】Contact part PTFE / Back rubber EPDM 【Connection】Flare, space saver, pillar, butt welding, union, prime lock
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Model number/Brand name
GEMÜ CleanStar C60/C67
Applications/Examples of results
- Wafer cleaning, etching, and coating processes - Mixing, transportation, and supply of CMP slurry - Chemical injection process for water treatment and wastewater treatment - Chemical supply in the wet process of semiconductor manufacturing - Secondary processes in pharmaceuticals, food, and biotechnology fields - Supply of high-purity solvents
Detailed information
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3-way switching valve type This is a 3-way switching valve that minimizes dead space. It can be used as a mixing valve or a manifold valve.
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T-type body type The T-shaped structure minimizes liquid pooling, allowing for one less T-fitting. It can be used as a sampling valve.
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High-Flow Body Type This is a high flow type body with a Cv value that can be up to twice that of standard products.
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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.