Application Example: "Pure Water and Ultra-Pure Water Production: Ultra-Pure Water (UPW)"
Proposal for valves and flow meters for the supply of ultra-pure water (UPW).
Ultra-pure water (UPW) is widely used in the manufacturing processes of semiconductor and solar cell wafers. The abrasives that adhere to the wafer surface are removed during the cleaning process and are washed again with ultra-pure water in the final stage. Cleaning with ultra-pure water is also necessary to remove residues generated during the subsequent etching process. Maintaining the wafer surface clean during such manufacturing processes leads to maximizing power generation efficiency. We offer diaphragm valves specifically developed for the treatment and supply of ultra-pure water, as well as for use in process equipment.
basic information
For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Usage】 ■Supply of UPW 【Examples of Achievements】 ■Manufacturing processes for semiconductor and solar cell wafers and others *For more details, please refer to the PDF document or feel free to contact us.
