Application example: "Supply of slurry"
We propose valves that are optimal for handling abrasive slurries.
The handling of slurry can be divided into three main steps: - Adjustment and mixing - Supply and transport - Removal and recovery GEMÜ products are designed with a low-resistance sheet shape that does not impose a load on both the valve and the fluid. All materials in contact with the fluid are made of PTFE or PFA, providing sufficient chemical resistance and high durability against the abrasiveness of slurries containing abrasive particles.
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
[Examples of Achievements] - Slicing from silicon ingot to wafer - Chemical mechanical polishing (CMP) - Wafer device formation (inter-device separation layer/transistor)
Detailed information
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C60 series PFA/PP diaphragm valve. It suppresses turbulence in the flow path, boasting high stability and flow rate.
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Valve manifold Can be freely laid out and designed according to individual applications. Reduces the risk of leaks by minimizing piping space and reducing connection points.
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HydraLine series High-purity pressure gauge made of PFA. Stable measurement is possible even with slurries.
Line up（2）
| Model number | overview |
|---|---|
| GEMÜ C60 | PFA/PP diaphragm valve |
| GEMÜ C67 | PFA/PP diaphragm valve |
