Application example: "Wet process of integrated circuit manufacturing plant"
We propose valves optimal for corrosive chemicals.
GEMÜ's valves, measuring instruments, and control systems do not cause material leaching even when exposed to corrosive chemicals used in wet processes, maintaining high fluid purity. GEMÜ offers PFA diaphragm valves, block valves, pressure gauges, and ultrasonic flow meters.
basic information
For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications/Examples of Achievements】 - Wafer cleaning - Wafer etching process - Wafer coating process
