Example of Use: "Slurry Systems in Microelectronics"
Proposal for the optimal valve for CMP slurry.
CMP slurry applications have extremely stringent specification requirements. GEMÜ components meet these requirements while maximizing flow and safely transporting abrasive slurries. For this application, we can offer PFA diaphragm valves, globe valves, measuring instruments, and fitting tubes from GEMÜ.
basic information
For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications/Examples of Achievements】 - Mixing of CMP slurry - Slurry transport between devices - Slurry supply for each process