ゲミュージャパン Official site

Example of Use: "Slurry Systems in Microelectronics"

Proposal for the optimal valve for CMP slurry.

CMP slurry applications have extremely stringent specification requirements. GEMÜ components meet these requirements while maximizing flow and safely transporting abrasive slurries. For this application, we can offer PFA diaphragm valves, globe valves, measuring instruments, and fitting tubes from GEMÜ.

basic information

For more details, please refer to the PDF document or feel free to contact us.

Price range

Delivery Time

Applications/Examples of results

【Applications/Examples of Achievements】 - Mixing of CMP slurry - Slurry transport between devices - Slurry supply for each process

High-purity chemicals and component and system solutions for semiconductor manufacturing processes.

PRODUCT

Recommended products

Distributors