Example of Use: "Slurry Systems in Microelectronics"
Proposal for the optimal valve for CMP slurry.
CMP slurry applications have extremely stringent specification requirements. GEMÜ components meet these requirements while maximizing flow and safely transporting abrasive slurries. For this application, we can offer PFA diaphragm valves, globe valves, measuring instruments, and fitting tubes from GEMÜ.
basic information
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Applications/Examples of results
【Applications/Examples of Achievements】 - Mixing of CMP slurry - Slurry transport between devices - Slurry supply for each process
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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.