Electric fluoropolymer control valve "GEMU C53"
Ideal for flow/back pressure control in semiconductor wet processes! Valve made of all-fluororesin with an electric motor [Compatible with CMP slurry].
This is an electric control valve made of fluororesin equipped with a high-precision stepping motor. It allows for precise control of the valve opening using DC24V (power supply) and 4-20mA (analog signal), enabling flow control and back pressure control. Its smooth flow path makes it suitable for fluids with complex compositions, such as CMP slurries. It also supports small flow control of less than 1 l/min.
basic information
【Size】1/4" to 1" 【Applicable Fluids】Corrosive and inert gases and liquids 【Fluid Temperature】10 to 150℃ 【Operating Pressure】Max 0.6MPa 【Ambient Temperature】Max 60℃ 【Body Material】PFA, PTFE 【Diaphragm Material】PTFE 【Connection】Flare, Pillar 【Power Supply】24 V DC 【Input Signal】4 – 20 mA / 0 – 10 V 【Operating Speed】Max. 2 mm/s 【Stroke】4 mm (Opening and closing time approximately 2 seconds) 【Standard Flow Range】0~14 l/min *For flow rates below 1 l/min or above 20 l/min, please inquire.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ● Flow control for cleaning devices ● Flow control of slurry in CMP equipment ● Back pressure control of the system ● Control of filling amount in filling applications ● Pulsation control of pumps
