Providing solutions for pressure relief valves and flow control valves made of fluororesin.
We propose a solution for pressure relief valves related to semiconductor chemical supply in a new form! It can be selected for a wide range of applications.
GEMU fluoropolymer valves for semiconductor manufacturing are actively used in chemical and CMP slurry supply equipment in semiconductor factories around the world. Among them, our control valves are also used as pressure relief valves. The pressure relief valve releases pressure on the secondary side to maintain a constant pressure on the primary side, especially to ensure stable supply of chemicals. Maintaining a consistent supply of chemicals, particularly for CMP, is a crucial point for maintaining wafer quality. Therefore, we can offer three types of control valves: - iComLine C50 + GEMU 1434μPos Positioner: Suitable for small flow control, allows for quick ON/OFF operation. - iComLine C53 Electric Control Valve: A valve with finer control, proven performance in CMP applications. - CleanStar C60 + GEMU 1434μPos Positioner: Optimal for CMP, also allows for ON/OFF operation. All of these can be controlled with 4-20mA, and you only need to prepare the valve; no additional components like precision regulators are necessary. Control is possible via a PLC control panel. By managing from the control panel, it also makes it easy to detect anomalies.
basic information
【Basic Specifications】 Size: 1/4" to 1 1/4" (depending on valve type) Connection: Pillar Super 300, flare, and others Body Material: PTFE, PFA Diaphragm Material: PTFE, PTFE/EPDM Power Supply: 24V DC Input/Output Signal: 4-20mA, etc. *Please note that options are limited depending on the valve type. We will help you select the optimal product based on your application and fluid conditions, so please contact us.
Price information
Please contact us.
Delivery Time
Model number/Brand name
iComLine・CleanStar
Applications/Examples of results
- Slurry supply system back pressure valve - Chemical flow control valve - Dosing Others
Line up（3）
| Model number | overview |
|---|---|
| C60 CleanStar + 1434 μPos Positioner | Design particularly optimized for CMP slurry. Low pressure loss, minimal liquid accumulation, and high washability valve design. |
| C53 iComLine Electric Control Valve | Equipped with a stepping motor, achieving precise control. |
| C50 iComLine +1434 μPos Positioner | Air-operated small flow control |
catalog（1）
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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.