GEMU® Stainless Steel Diaphragm Valve (for High Purity Organic Solvents)
GEMÜ stainless steel diaphragm valve for high-purity organic solvents
In the semiconductor industry, organic solvents such as isopropanol, acetone, and N-methylpyrrolidone (NMP) are used for the purposes of dissolving and cleaning substances. For example, in the lithography process, photoresist is removed with special solvents. Because these solvents have a low flash point and are conductive, stainless steel components are particularly suitable. GEMÜ offers an optimal product lineup of stainless steel valve components for this application area. - High Kv value - Design that minimizes contamination - Durable actuators and diaphragms GEMÜ valves are well-regarded for these features. They are widely used in semiconductor factories around the world, with over 20 years of proven experience. Semiconductor factories also have the following requirements: - Cleaning products - Explosion-proof compliance - Electro-polishing All of the above can be accommodated. We also handle a wide range of piping connection standards and actuators, allowing us to select the optimal products tailored to our customers' needs.
basic information
【Specifications】 Actuator Material: Resin and Stainless Steel Pipe Diameter: 4 to 150A Connection: Welding, Ferrule, VCR, Flange Body Material: 1.4435 (Equivalent to SUS316L) Diaphragm Material: PTFE/EPDM Operation: Normally Closed, Normally Open, Double Acting, Manual Maximum Operating Pressure: 1.0Mpa (Varies by type.) Applicable Temperature Range: -30 to 130℃ (Varies by type.) Ambient Temperature Range: -20 to 60℃ (Varies by type.)
Price information
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Model number/Brand name
GEMU stainless steel diaphragm
Applications/Examples of results
- High-purity organic solvent supply equipment for semiconductors - High-purity chemical production plant (photoresist and others)
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Line up（7）
| Model number | overview |
|---|---|
| 650 BioStar | Air-operated stainless steel actuator |
| 654 BioStar | Manual stainless steel actuator |
| 653 BioStar | Manual resin-made actuator |
| 687 | Air-operated resin actuator (15A and above) |
| 673 | Manual resin actuator |
| 671 | Manual resin actuator |
| 695 | Air-operated resin actuator |
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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.