Stable slurry supply in semiconductor manufacturing! Application case studies.
Achieving stable slurry supply! GEMU slurry supply application case for semiconductor manufacturing.
In the supply of CMP slurry, disturbances in the flow within the supply loop can lead to the agglomeration of the slurry. To ensure that particles in the CMP slurry are evenly dispersed, the CMP tool filter is connected upstream to remove coarse particles. The flow optimization design of the GEMÜ valve block reduces the agglomeration of the medium relatively. This extends the lifespan of the filter, increases the replacement intervals, and leads to cost savings. The compatible product range of the GEMÜ PC50 iComLine multi-port valve block The advantage of the POU (Point of Use) box is its compactness, allowing it to be integrated into the intermediate layer of the system. This saves space within the cleanroom. Furthermore, the flow optimization design of the block helps prevent agglomeration of the medium. Depending on the structure of the system, various customization options are available.
basic information
【Specifications】 ・PC50 iComLine Custom-made high-purity resin block valve *Please inquire for details. ・CleanStar Size: 1/4" to 1 1/4" Connection: Pllar Super 300, flare, PrimeLock, tube out, pipe out Body material: PFA Diaphragm material: PTFE/EPDM Operation: Normally closed, normally open, manual Maximum operating pressure: 0.6 MPa Usable temperature: -10 to 150℃ Ambient temperature: -10 to 60℃
Price information
PC50 iComLine *Please inquire for details. CleanStar C60・C67 *Approximately 2 to 2.5 months.
Delivery Time
Model number/Brand name
PC50 iConLine・CleanStar
Applications/Examples of results
Semiconductor manufacturing chemical supply device Semiconductor manufacturing slurry supply device Semiconductor manufacturing organic solvent supply device Cleaning device CMP device Others
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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.