The vacuum section of the pump does not use lubricating oil, allowing for an oil-free and clean vacuum. Dry pumps are gas transfer type vacuum pumps, with structural differences such as diaphragm, screw, scroll, and Roots types, and we provide the optimal pump suited to your applications. A100L / A200L • Ideal dry pump for use in transfer chambers for load locks and clean processes • Low vibration, high throughput: capable of 300 cycles per hour in a 20L L/L chamber • Achieves low power consumption through the use of a high-efficiency motor • Compact design with a footprint of 0.17m²; can be positioned vertically or horizontally • Can be stacked in two layers (only horizontal with the intake facing) A103P • For medium processes (etching, ion implantation, PVD, etc.) • Energy-saving and space-saving

The vacuum section of the pump does not use lubricating oil, allowing for an oil-free and clean vacuum. Dry pumps are gas transfer vacuum pumps with structural differences such as diaphragm, screw, scroll, and Roots types, and we provide the optimal pump suited to your applications. A4 Series • Achieves low power consumption with a multi-Roots structure and high-efficiency motor • Suppresses the accumulation of by-products through heater temperature control • Long pump lifespan due to corrosion-resistant nickel coating (XN model) • Extends the operating time of process equipment with excellent particle exhaust capability • Enhanced monitoring functions allow for better control of pump conditions (cooling water sensors, vibration boxes, etc.) • Prevents clogging in the pump and exhaust piping with hot N2 • Complies with IP33, SEMI S2, and UL standards

The vacuum section of the pump does not use lubricating oil, allowing for an oil-free and clean vacuum. Dry pumps are gas transfer type vacuum pumps, with structural differences such as diaphragm, screw, scroll, and Roots types, and we provide the optimal pump suited to your application. ADH Series • High-performance dry pumps for high-end processes • Exhaust performance of H2 gas equivalent to that of N2 gas • Ideal for ALD, epitaxial growth, and EUV processes (can be used with hydrogen and silane-based gases) • Achieves low power consumption through multi-Roots structure, high-efficiency motor, and idling mode • High-power motor reduces large particle discharge and failures during pump restart