Rotary Pump Hena Series / Stage 1 Single Stage
Industry-leading basic performance
• By combining with the turbo molecular pump manufactured by Pfeiffer Vacuum, a simple system can be constructed. • Worldwide service → Service support is available not only in Japan but also globally.
basic information
Fai-Fa Vacuum Company is headquartered in Asler, Germany, and has been developing and manufacturing cutting-edge vacuum equipment, vacuum measurement instruments, and vacuum analysis instruments since 1890. The company developed the world's first turbo pump over 50 years ago. Since then, it has advanced technological innovation and has become a leading company in this field, providing optimal vacuum environments to customers in various sectors around the world, including semiconductors, analysis, coating, industry, and R&D.
Price range
Delivery Time
Model number/Brand name
Hena series by Fifa Vacuum Company
Applications/Examples of results
【Applications】 •Analysis equipment •Accelerators •Nuclear fusion devices •Others
Detailed information
Line up（8）
| Model number | overview |
|---|---|
| Hena26 | •Exhaust speed: 417 l/min (50Hz), 500 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G1 1/4 |
| Hena41 | •Exhaust speed: 667 l/min (50Hz), 800 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G1 1/4 |
| Hena61 | •Exhaust speed: 1,050 l/min (50Hz), 1,267 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G1 1/4 |
| Hena101 | •Exhaust speed: 1,667 l/min (50Hz), 2,000 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G1 1/4 |
| Hena201 | •Exhaust speed: 3,333 l/min (50Hz), 4,000 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G2 1/4 |
| Hena301 | •Exhaust speed: 5,000 l/min (50Hz), 6,000 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G2 1/4 |
| Hena401 | •Exhaust speed: 6,667 l/min (50Hz), 8,000 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G2 1/4 |
| Hena631 | •Exhaust speed: 10,000 l/min (50Hz), 12,667 l/min (60Hz) •Achievable vacuum level: 30 Pa •Inlet diameter: G3 1/4 |
