Vacuum gauge (active line)
• Abundant variations → Allows selection of the optimal model according to the application • Service support available not only in Japan but also worldwide
It is a measuring instrument that measures the degree of vacuum (pressure). It can be divided into total pressure vacuum gauges and partial pressure vacuum gauges, but here we will focus on total pressure vacuum gauges. Total pressure vacuum gauges can be broadly classified into the following two types: A: Mechanical measurement method that is independent of gas type B: Measurement method that utilizes the properties of gases and is dependent on gas type
basic information
Faifabakyūmu Corporation is headquartered in Asura, Germany, and has been developing and manufacturing cutting-edge vacuum equipment, vacuum measurement instruments, and vacuum analysis instruments since 1890. The company developed the world's first turbo pump over 50 years ago. Since then, it has continued to innovate and has established itself as a leading company in this field, providing optimal vacuum environments to customers across various sectors, including semiconductors, analysis, coating, industry, and R&D in countries around the world.
Price range
Delivery Time
Model number/Brand name
FIFA Vacuum Company manufactured vacuum gauge / Active Line
Applications/Examples of results
• Analysis equipment • Semiconductor devices • Accelerators • Nuclear fusion devices • Others
Detailed information
Line up（31）
| Model number | overview |
|---|---|
| APR250 | • A mechanical measurement method that is independent of gas type • Piezo gauge • Flange: 16KF (NW16) • Measurement range: upper limit 1.1E5 Pa, lower limit 10 Pa • Maximum allowable pressure: 3 Pa |
| APR260 | • A mechanical measurement method that is independent of gas type • Piezo gauge • Flange: 16CF (ICF34) • Measurement range: upper limit 1.1E5 Pa, lower limit 10 Pa • Maximum allowable pressure: 3 Pa |
| APR262 | • A mechanical measurement method that is independent of gas type • Piezo gauge • Flange: G1/4 |
| APR265 | • A mechanical measurement method that is independent of gas type • Piezo gauge • Flange: G1/4 |
| APR266 | • A mechanical measurement method that is independent of gas type • Piezo gauge • Flange: G1/4 |
| APR267 | • A mechanical measurement method that is independent of gas type • Piezo gauge • Flange: G1/4 |
| CMR361 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR362 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR363 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR364 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR365 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR371 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge - temperature (45°C correction) • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR372 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge - temperature (45°C correction) • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR373 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge - temperature (45°C correction) • Flange: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR374 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge with temperature correction (45°C) • Flanges: 16KF (NW16), 16CF (ICF34), 1/2 |
| CMR375 | • A mechanical measurement method that is independent of gas type • Ceramic capacitance gauge with temperature correction (45°C) • Flanges: 16KF (NW16), 16CF (ICF34), 1/2 |
| TPR280 | • Measurement method utilizing gas properties dependent on gas type • Pirani gauge • Flange: 16KF (NW16), 16CF (ICF34) • Measurement range: upper limit 1E5 Pa, lower limit 5E-2 Pa • Maximum allowable pressure: 1E6 Pa |
| TPR281 | • Measurement method utilizing gas properties dependent on gas type • Corrosion-resistant Pirani gauge • Flange: 16KF (NW16), 16CF (ICF34) • Measurement range: upper limit 1E5 Pa, lower limit 5E-2 Pa • Maximum allowable pressure: 1E6 Pa |
| TPR270 | • Measurement method utilizing gas properties dependent on gas type • Pirani gauge • Flange: 16KF (NW16), 16CF (ICF34) • Measurement range: upper limit 1E5 Pa, lower limit 1E-2 Pa • Maximum allowable pressure: 1E6 Pa |
| TPR271 | • Measurement method utilizing gas properties dependent on gas type • Corrosion-resistant Pirani gauge • Flange: 16KF (NW16), 16CF (ICF34) • Measurement range: upper limit 1E5 Pa, lower limit 5E-2 Pa • Maximum allowable pressure: 1E6 Pa |
| PCR280 | • Measurement method utilizing the properties of gases, depending on the type of gas • Pirani & capacitance combination gauge • Flange: 16KF (NW16), 16CF (ICF34) • Measurement range: upper limit 1.5E5 Pa, lower limit 5E-3 Pa • Maximum allowable pressure: 5E5 Pa |
| IKR360 | • Measurement method utilizing gas properties dependent on gas type • Cold cathode gauge • Flanges: 25KF (NW25), 40KF (NW40), 40CF (ICF70) • Measurement range: upper limit 1 Pa, lower limit 1E-7 Pa • Maximum allowable pressure: 1E6 Pa |
| IKR361 | • Measurement method utilizing gas properties dependent on gas type • Cold cathode gauge • Flanges: 25KF (NW25), 40KF (NW40), 40CF (ICF70) • Measurement range: upper limit 1 Pa, lower limit 1E-7 Pa • Maximum allowable pressure: 1E6 Pa |
| IKR270 | • Measurement method utilizing gas properties dependent on gas type • Cold cathode gauge • Flanges: 25KF (NW25), 40KF (NW40), 40CF (ICF70) • Measurement range: upper limit 1 Pa, lower limit 5E-9 Pa • Maximum allowable pressure: 1E6 Pa |
| PKR360 | • Measurement method utilizing gas properties dependent on gas type • Pirani & cold cathode combination gauge • Flanges: 25KF (NW25), 40KF (NW40), 40CF (ICF70) • Measurement range: upper limit 1E5 Pa, lower limit 1E-7 Pa • Maximum allowable pressure: 1E6 Pa |
| PKR361 | • Measurement method utilizing gas properties dependent on gas type • Pirani & cold cathode combination gauge • Flanges: 25KF (NW25), 40KF (NW40), 40CF (ICF70) • Measurement range: upper limit 1E5 Pa, lower limit 1E-7 Pa • Maximum allowable pressure: 1E6 Pa |
| IMR265 | • Measurement method utilizing gas properties dependent on gas type • Process ion gauge • Flanges: 16KF (NW16), 25KF (NW25), 40KF (NW40), 16CF (ICF34), 40CF (ICF70) • Measurement range: upper limit 1.5E5 Pa, lower limit 2E-4 Pa • Maximum allowable pressure: 5E5 Pa |
| PBR260 | • Measurement method utilizing gas properties dependent on gas type • Pirani & hot cathode combination gauge • Flange: 25KF (NW25), 40KF (NW40), 40CF (ICF70) • Measurement range: upper limit 1E5 Pa, lower limit 5E-8 Pa • Maximum allowable pressure: 2E6 Pa |
| TPG361 | • Common controller for active line • Single gauge controller • Number of connectable units: 1 • Number of relays: 2 |
| TPG362 | • Common controller for active line • Dual gauge controller • Number of connectable units: 2 • Number of relays: 4 • Vacuum degree display format: simultaneous display possible |
| TPG366 | • Common controller for active line • Maxi gauge controller • Number of connectable units: 6 • Number of relays: 6 • Vacuum degree display format: 6ch simultaneous display available |
