Mass spectrometer
• Industry-leading basic performance • Worldwide service → Service support available not only in Japan but also globally
It is a measuring instrument that measures the quality of vacuum (pressure) and is also called a partial pressure vacuum gauge. It allows us to know what gases are present in the vacuum and to what extent. Mass spectrometers are mainly classified into the following three types: A. Magnetic field deflection type B. Quadrupole type C. Time-of-flight type
basic information
Faifaba Vacuum Company is headquartered in Aslar, Germany, and has been developing and manufacturing cutting-edge vacuum equipment, vacuum measurement instruments, and vacuum analysis instruments since 1890. The company developed the world's first turbo pump over 50 years ago. Since then, it has continued to innovate and has established itself as a leading company in this field, providing optimal vacuum environments to customers in a diverse range of sectors including semiconductors, analysis, coating, industry, and R&D across various countries.
Price range
Delivery Time
Model number/Brand name
Fifab Vacuum Corporation Mass Spectrometer / QMG250, GSD350, QMG700
Applications/Examples of results
【Applications】 •QMG250 Suitable for a wide range of fields including industrial and environmental analysis, research and development, semiconductor production, and coating technology. •GSD350 Well-suited for the analysis of common gases with low adsorption (such as nitrogen, oxygen, argon, etc.). •QMG700 Particularly suitable for high-precision measurement of oxides and other substances in exhaust gases during catalyst development and analysis.
Detailed information
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• Modular configuration compatible with a variety of applications • Compact and high performance • Simple system integration through diverse interfaces • Easy measurement function via web browser • High sensitivity, low noise, and class-leading high dynamic range • Fast measurement with a speed of 1ms (Dwell time) • Standard equipped with analog and digital inputs, and digital outputs (expandable as an option) • New PV MassSpec software Quantitative analysis using matrix method Sequence creation and internal calculation functions Acquisition of external signals such as temperature information Control of external devices through threshold function
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• The dedicated two-stage pressure reduction system prevents segregation and achieves fast response. • Capillary with temperature control heater up to 200°C, and up to 350°C (optional). • Adoption of a specially designed ion source efficiently ionizes a small amount of introduced gas. • Space-saving, lightweight design with a detachable touch panel. • High-speed measurement with a minimum dwell time of 1ms. • Built-in calibration unit (optional) and corrosion-resistant version (optional). • New PV MassSpec software Quantitative analysis using matrix method Sequence creation and internal calculation functions Incorporation of external signals such as temperature information Control of external devices through threshold function.
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• Multi-purpose high-performance quadrupole mass spectrometer • Modular configuration suitable for a variety of applications • Achieves high sensitivity, low noise, and a maximum dynamic range of 10 digits
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Line up（10）
| Model number | overview |
|---|---|
| QMG250 F1 | •Mass range: 1-100 amu •Detector: Faraday •Detection limit: 4E-11 Pa (Faraday) •Sensitivity: Ar 5E-6 A/Pa •Maximum allowable pressure: 5E-2 Pa (Faraday) •Adjacent peak contribution ratio Mass40/41: <10 ppm •Baking temperature of analysis tube: Maximum 300℃ (maximum 200℃ during operation, maximum 150℃ when using EM) |
| QMG250 F2 | •Mass range: 1-200 amu •Detector: Faraday •Detection limit: 5E-11 Pa (Faraday) •Sensitivity: Ar 4E-6 A/Pa •Maximum allowable pressure: 5E-2 Pa (Faraday) •Adjacent peak contribution ratio Mass40/41: <20 ppm •Baking temperature of analysis tube: Maximum 300℃ (maximum 200℃ during operation, maximum 150℃ when using EM) |
| QMG250 F3 | •Mass range: 1-300 amu •Detector: Faraday •Detection limit: 7E-11 Pa (Faraday) •Sensitivity: Ar 3E-6 A/Pa •Maximum allowable pressure: 5E-2 Pa (Faraday) •Adjacent peak contribution ratio Mass40/41: <50 ppm •Baking temperature of analysis tube: Maximum 300℃ (maximum 200℃ during operation, maximum 150℃ when using EM) |
| QMG250 M1 | •Mass range: 1-100 amu •Detector: Faraday EM •Detection limit: 3E-13 Pa (C-SEM) •Sensitivity: Ar 5E-6 A/Pa •Maximum allowable pressure: 5E-2 (Faraday), 5E-3 (C-SEM) •Adjacent peak contribution ratio Mass40/41: <10 ppm •Baking temperature of analysis tube: Maximum 300℃ (maximum 200℃ during operation, maximum 150℃ when using EM) |
| QMG250 M2 | •Mass range: 1-100 amu •Detector: Faraday EM •Detection limit: 4E-13 Pa (C-SEM) •Sensitivity: Ar 4E-6 A/Pa •Maximum allowable pressure: 5E-2 (Faraday), 5E-3 (C-SEM) •Adjacent peak contribution ratio Mass40/41: <20 ppm •Baking temperature of analysis tube: Maximum 300℃ (maximum 200℃ during operation, maximum 150℃ when using EM) |
| QMG250 M3 | •Mass range: 1-100 amu •Detector: Faraday EM •Detection limit: 5E-13 Pa (C-SEM) •Sensitivity: Ar 3E-6 A/Pa •Maximum allowable pressure: 5E-2 (Faraday), 5E-3 (C-SEM) •Adjacent peak contribution ratio Mass40/41: <50 ppm •Baking temperature of analysis tube: Maximum 300℃ (maximum 200℃ during operation, maximum 150℃ when using EM) |
| GSD350 OmniStar | •Measured mass numbers: 1-100/1-200/1-300 •Capillary material: Stainless quartz •Gas introduction method: Valve controlled •Gas flow rate: 1~2 sccm |
| GSD350 ThermoStar | •Measured mass numbers: 1-100/1-200/1-300 •Capillary material: Quartz (to prevent memory effects) •Gas introduction method: Continuous introduction •Gas flow rate: 1~2 sccm |
| HiQuad QMG700 / High-resolution measurement type | •Mass analysis range: 1-128 •Maximum measurement pressure: 1E-3 Pa (SEM), 1E-2 Pa (Faraday) •Detector: Discrete SEM / Faraday •Q pole: 16mm diameter, 300mm length, Molybdenum •Minimum detection limit: 5E-14 Pa •Minimum detection limit (partial pressure): 0.3 ppb •Measurement operating temperature: Maximum 150 ℃ •Baking temperature: Maximum 180 ℃ during operation / Maximum 400 ℃ for analysis tube alone |
| HiQuad QMG700 / High mass measurement type | •Mass analysis range: 1-300, 512 •Maximum measurement pressure: 1E-3 Pa (SEM), 1E-2 Pa (Faraday) •Detector: Discrete SEM / Faraday •Q pole: 8mm diameter, 200mm length, Molybdenum (SUS only for 300 amu) •Detection limit: 1E-13 Pa (512 amu type) •Operating temperature: Maximum 150 ℃ •Baking temperature: Maximum 180 ℃ during operation / Maximum 400 ℃ for analysis tube alone |
