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AQUA is a system that automatically converges ion beams extracted from an electrostatic accelerator to approximately 1μm in diameter, enabling high spatial resolution ion beam analysis. Traditionally, microbeam analysis required beam adjustment work by specialized technicians, consuming valuable machine time; however, with our uniquely developed beam auto-focusing system, setup can be completed within one hour. Additionally, it is equipped with a data analysis system, allowing for a total package proposal from beam adjustment to data analysis.

■Scan Control When performing micro ion beam analysis, there is a process of narrowing the beam before irradiation, which has previously taken several hours, consuming valuable machine time. Therefore, this device adopts a scan control system that automatically calculates the beam diameter from the yield curve of secondary electrons emitted when scanning a metal mesh with the ion beam, and feeds back that information to the current flowing to the quadrupole lens. ■Automatic Beam Focusing System (Software) By varying the current flowing to the quadrupole lens, the magnetic field strength in the space inside the quadrupole lens changes, allowing for the adjustment of the focal length, similar to an optical lens. This automatic focusing system has significantly reduced the time required for beam adjustment before irradiation, enabling beam focusing to be completed in under one hour. ■Various Control Parameters The micro beam line consists of vacuum pumps, micro slits, divergence slits, Q lenses, stages, and other components. The automatic focusing system allows for the control of all these mechanisms through software.

■Micro-PIXE Analysis It is possible to obtain elemental maps by scanning samples using a microbeam. With a resolution of a few micrometers, it is suitable for analyzing environmental samples such as aerosols and biological samples such as cells. ■Micron CT This is an X-ray CT specialized for tiny samples, featuring micron resolution. By combining ion microbeams with PIXE method to produce quasi-monochromatic X-rays, it achieves high contrast and approximately 1µm spatial resolution. ■RBS Analysis It is possible to investigate the composition, quantity, and depth distribution of atoms contained in solids. Due to the high reliability of data such as scattering cross-sections and energy loss in the sample used for quantification, depth composition analysis can be performed without using standard samples.