RIBER Corporation Molecular Beam Epitaxy (MBE) System
The passivation MBE device is composed of various chambers specially designed for laser facet passivation and other purposes.
The passivation MBE (Molecular Beam Epitaxy) system consists of various chambers specially designed for surface passivation or laser facet passivation. It is possible to use various coatings to protect the surfaces and facet surfaces, with typical materials including ZnSe, SiN, and oxides. As an example of configuration, it may include a chamber that features the ability to invert the device holder at both ends of the laser for cleaning and passivation, as well as a hydrogen (H2) plasma cleaning chamber for removing the natural oxide layer before the passivation film. The wafers move from chamber to chamber under high vacuum conditions, maintaining cleanliness throughout the entire process. Additional process chambers can be added according to customer requirements and process time.
basic information
RIBER, a French company, is the world's number one supplier of molecular beam epitaxy (MBE) systems and components (MBE cells and evaporation sources), established in 1964. To date, it has delivered approximately 800 systems primarily for the deposition of compound semiconductor materials such as GaAs, InP, and GaN. Currently, major universities, public research institutions, device manufacturers, and epitaxial foundries around the world operate RIBER's MBE systems, contributing as research or production tools in various cutting-edge fields such as data communication, 5G/6G, VCSEL lasers, photonics, sensors, and 3D sensing. In Japan, Hakuto Co., Ltd. serves as the general agent, providing sales and maintenance services for the company's products.
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Applications/Examples of results
【Applications】 - Semiconductor lasers, sensing, data communication, etc. 【Examples of Achievements】 - Major companies producing high-output, long-lifetime semiconductor lasers are utilizing RIBER's MBE equipment for passivation, contributing as research or production tools in cutting-edge fields.
