Spinning rotor vacuum gauge/spinning rotor gauge
A vacuum gauge that combines "excellent measurement accuracy" and "high robustness."
The Spinning Rotor Gauge (SRG) system consists of a stainless steel measuring tube that includes a measuring head, a control/readout unit, and a 4.5mm ball bearing ball functioning as a pressure sensor. The measuring head contains a magnet and coil system necessary for levitation, vibration damping, acceleration, and speed sensing of the sensor ball, and it is also equipped with a temperature sensor. One end of the measuring tube is sealed, while the other end is attached to a vacuum chamber via welding or a flange connection. The sensor does not require mechanical or electrical feedthroughs to the outside. For measurement, the sensor ball is levitated by a magnetic field and accelerated to speeds of over 600 rps, then it rotates in inertia, utilizing the deceleration rate of the sensor ball due to the drag (molecular drag) from the tangential momentum transfer from the incoming gas molecules within the measuring tube.
basic information
ph-instruments develops, manufactures, and sells cost-effective high vacuum pressure gauges based on advanced spinning rotor gauge technology.
Price range
Delivery Time
Model number/Brand name
PH Instruments' Spinning Rotor Vacuum Gauge Series
Applications/Examples of results
- Standard calibration - Vacuum deposition (semiconductors/optics) - Vacuum insulation (cryogenic technology, liquefied gases, superconductivity) - Freeze-drying - Others
Detailed information
Line up(3)
Model number | overview |
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DosiTorr - Spinning Rotor Gauge | ・Equipped with an electronic ionization ion source ・Compact, high-speed, and high-sensitivity mass spectrometer ・No wear, operates at room temperature, and has extremely long-term stability ・Does not generate any ions, plasma, heat (thermocouples/pirani), or particles that could interfere with the process ・No parts subject to mechanical stress that could deform, such as Inconel or ceramic membranes |
VIM-2 - Spinning Rotor Gauge with Controller | ・Mobile battery-operated ・Remote operation possible (via Bluetooth app) ・Ideal for measuring cryogenic, vacuum-insulated liquid gas tanks ・No electrical feedthrough required ・Very robust and resistant to aging, all-metal sensor |
IONCheck - Ion Gauge Calibration and Comparison System | ・Complete solution for calibration and comparison of high vacuum gauges ・Used as a certified accurate and long-term stable pressure standard ・Real-time measurement of freeze-drying processes |