TRIBUS SYSTEM's PVD system
A new PVD device proposed by a company that knows Endura inside and out.
TRIBUS SYSTEM is a subsidiary of Semicat, a company specializing in the refurbishment of EnduraⓇ PVD systems manufactured by Applied Materials. The company was established in 2020 and has been manufacturing and selling its uniquely developed PVD system (SURPASS P200Ⓡ) since 2021, based on the knowledge and experience gained at Semicat. Compared to conventional PVD systems, it offers improved throughput and software operability and flexibility, leading to accelerated adoption by companies in major semiconductor manufacturing countries.
basic information
<Product Features> ✓ Easy visualization of processing status through a uniquely designed GUI ✓ Each process chamber is equipped with a PLC, allowing management of dozens of parameters *Standard Endura chambers and process kits can be installed ✓ No software licensing fees, enabling cost reduction ✓ Equipped with Auto Wafer Centering (AWC) to detect misalignment and incorrect transport during transfer to the chamber ✓ Optional installation of Two Dual Blade Robots contributes to improved throughput ✓ Comes with process guarantees *Installation of high-speed thick film Al chamber (optional) is possible
Price range
Delivery Time
Model number/Brand name
SURPASS P200
Applications/Examples of results
Metalization with Ti/TiN and Al, etc.
