Fluorine vacuum pump oil
Pump oil superior to PFPE.
It does not react with acidic gases or liquids, contributing to a longer lifespan. It can be wiped off with general solvents, making maintenance easier. In semiconductor vacuum pumps, the appropriate lubricant can reduce maintenance and cost burdens associated with reactive process chemistry.
basic information
- There is no weight loss. - The acidity does not increase. - There is no decrease in viscosity.
Price range
Delivery Time
Model number/Brand name
HaloVac
Applications/Examples of results
Vacuum pump
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Halocarbon has been operating as one of the world's leading companies in the production of high-quality fluorochemicals for over 70 years. We strive to leverage our expertise in fluorochemicals to solve challenging problems while building sustainable partnerships. We will continue to create innovations together with our customers in the fields of electronic materials, fluorinated high-performance liquids, and life sciences.

























