羽生田鉄工所 Official site

A must-see for semiconductor device manufacturers! Round and square clutch door type pressure vessels.

We manufacture various pressure vessels suitable for semiconductor device void prevention, ranging from small to large sizes, for various applications needed in the semiconductor manufacturing process!

At Hanyuda Iron Works, we provide a one-stop service from specification review, design, manufacturing, assembly, to delivery of atmosphere treatment equipment such as vacuum, pressurized, and heated systems. We have been involved in the production of pressure vessels for various devices used in semiconductor manufacturing processes. We often assist in creating prototypes for the production of pressure vessels suitable for void prevention in semiconductor devices and for researching new manufacturing methods. We accommodate all requests with custom-made solutions. If you are considering new manufacturing methods, experiments can also be conducted using our permanently installed pressurized heating treatment equipment. 【Features】 ■ We manufacture containers ranging from φ250 small vessels to φ3000 large vessels. *For more details, please refer to our catalog or feel free to contact us.

Related Link - https://www.hanyuda.co.jp/products/clutchdoor/

basic information

For more details, please refer to the catalog or feel free to contact us.

Price range

Delivery Time

Applications/Examples of results

【Examples of Use】 ■ Bonding wafers with adhesive, degassing (pressurized heating) ■ Wafer drying (reduced pressure heating) ■ Single crystal sapphire manufacturing furnace (prototype) ■ Annealing treatment, distortion correction (steam heating, hot air drying) *For more details, please refer to the catalog or feel free to contact us.

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We have leveraged the technology we have cultivated through boiler manufacturing to aim to become Japan's leading "clutch door" manufacturer, focusing on the production and sales of round and square clutch door-type pressure vessels. As pressure vessels for production equipment, their applications have diversified alongside the development of various industries and advancements in production technology. We consistently manufacture everything from various steel plates to industrial machinery at our factory, and we also handle OEM for various processing equipment, including our own brand of mushroom culture sterilization devices and autoclaves. By newly establishing a research and development department, we aim to enhance our technological capabilities to respond to the high added value of production equipment, while further refining our "blacksmithing skills" to continue creating valuable products in the future.